Flashcards: Wafer Etching Fundamentals — 11 cards

What is etching in semiconductor processing?

Etching removes material uniformly or locally to form microcircuit patterns.

Etching Role and Definition - Concept

Material removal to create patterns on wafers

What is the goal of dry etching in photolithography?

To transfer the photolithographic pattern by removing uncovered oxide.

Wet vs Dry Etching - Difference

Wet uses chemicals; dry uses plasma gases

How does wet chemical etching remove material?

It dissolves material directly or converts it into a soluble compound.

Dry Etching Equipment - Example

Samco reactive ion etcher

What type of chemicals does dry etching use?

Dry etching uses gases instead of liquid chemicals.

Pre-Start Checks - Key step

Verify power, valves, gases, and pressures

Wafer Loading Steps - Key

Auto mode, vent chamber, open lid, load wafer, close lid

System Startup - Process

Power on, start pumps, wait for rpm

Wet Resist and Oxide Etching - Purpose

Remove oxide and resist with chemical processes